User Information

Title/Place of Publication
Publication ID	13383
Date Created	2008.12.10 13:55
DOI	10.1063/1.3023066
Open Access URL
English Title	Low Power Density Multihole Cathode Very-High-Frequency Plasma for Mixed Phase Si:H Thin Films
Type of Publication	Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)	Journal Title Applied Physics Letters Vol. 93 No. 19 Year of Publication 2008 Page 191502
Place of Publication (Oral, Poster)	Conference Title Date Venue
Research Area
Research Method

Authors
	User Card ID No.	Last/Family	First/Given	Affiliation
First Author		Jariwala	Chetan	Institute for Plasma Research
Coauthor 1	0001854	Chainani	Ashish	Institute for Plasma Research, SPring-8/RIKEN
Coauthor 2	0004940	Eguchi	Ritsuko	SPring-8/RIKEN, The University of Tokyo
Coauthor 3	0001770	Matsunami	Masaharu	SPring-8/RIKEN, The University of Tokyo
Coauthor 4	0001732	Shin	Shik	SPring-8/RIKEN, The University of Tokyo
Coauthor 5		Bhatt	Sudhir	Institute for Plasma Research
Coauthor 6		Dalal	Vikram	Iowa State University
Coauthor 7		John	Pucadyil Ittoop	Institute for Plasma Research

Related Proposal Information
Proposal Number None Beamline BL17SU Facility to be used SPring-8 Classification within the Site Experiment