Title/Place of Publication
Publication ID
13321
Date Created
2008.12.05 17:25
DOI
10.1016/j.vacuum.2008.04.041
Open Access URL
English Title
Measurement of Electromigration-Induced Stress in Aluminum Alloy Interconnection
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Vacuum
Vol.
83
No.
3
Year of Publication
2008
Page
637-640
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0008085
Kusaka
Kazuya
University of Tokushima
Coauthor 1
0008084
Hanabusa
Takao
University of Tokushima
Coauthor 2
0009662
Shingubara
Shoso
Kansai University
Coauthor 3
0008092
Matsue
Tatsuya
Niihama National College of Technology
Coauthor 4
0003369
Sakata
Osami
SPring-8/JASRI
Related Proposal Information
Proposal Number
2003A0305
Beamline
BL13XU
Project Leader
英 崇夫
Proposal Number
2003B0322
Beamline
BL13XU
Project Leader
英 崇夫