Title/Place of Publication
Publication ID
13097
Date Created
2008.10.25 14:59
DOI
Open Access URL
English Title
Similarity between Strain Fields Induced by the Xe/NH
3
Plasma Nitridation and the K/O
2
Plasma Oxidation Revealed by a Multi-Wave X-ray Diffraction Phenomenon
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Transactions of the Materials Research Society of Japan
Vol.
33
No.
3
Year of Publication
2008
Page
607-610
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0003297
Yashiro
Wataru
The University of Tokyo
Coauthor 1
0001245
Yoda
Yoshitaka
SPring-8/JASRI
Coauthor 2
0020773
Matsushita
Yuuitirou
The University of Tokyo
Coauthor 3
0020503
Aratani
Takashi
Tohoku University
Coauthor 4
0015560
Teramoto
Akinobu
Tohoku University
Coauthor 5
0007880
Hattori
Takeo
Tohoku University
Coauthor 6
0004138
Miki
Kazushi
National Institute for Materials Science
Related Proposal Information
Proposal Number
2007A1695
Beamline
BL09XU
Project Leader
矢代 航
Proposal Number
2007B1076
Beamline
BL09XU
Project Leader
矢代 航