Title/Place of Publication
13068
2008.10.20 14:38
Depth Distribution of Ge Fraction in Very-Thin-SGOI Layers Using Total-External-Reflection X-ray Diffraction
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Transactions of the Materials Research Society of Japan
33 3 2008 599-602
Authors
 
First Author 0003394 Kawamura Tomoaki NTT Corporation
Coauthor 1 0006299 Omi Hiroo NTT Corporation
Coauthor 2 0004124 Kimura Shigeru SPring-8/JASRI
Coauthor 3 0001171 Mizumaki Masaichiro SPring-8/JASRI
Related Proposal Information
2004B0031 BL46XU 川村 朋晃
R05A0032 BL46XU 木村 滋
2005B0936 BL46XU 木村 滋