Title/Place of Publication
Publication ID
12706
Date Created
2008.06.30 20:01
DOI
10.1143/APEX.1.065004
Open Access URL
English Title
X-ray Reflectivity Study on Depth Profile of Acid Generator Distribution in Chemically Amplified Resists
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Applied Physics Express
Vol.
1
No.
6
Year of Publication
2008
Page
065004
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
[A10] Life Science
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0018836
Fukuyama
Takehiro
Osaka University
Coauthor 1
0018834
Kozawa
Takahiro
Osaka University
Coauthor 2
0018841
Tagawa
Seiichi
Osaka University
Coauthor 3
0019014
Takasu
Ryoichi
Tokyo Ohka Kogyo Co., Ltd.
Coauthor 4
0019012
Yukawa
Hiroto
Tokyo Ohka Kogyo Co., Ltd.
Coauthor 5
0018845
Sato
Mitsuru
Tokyo Ohka Kogyo Co., Ltd.
Coauthor 6
0021285
Onodera
Junichi
Tokyo Ohka Kogyo Co., Ltd.
Coauthor 7
0002088
Hirosawa
Ichiro
SPring-8/JASRI
Coauthor 8
0005256
Koganezawa
Tomoyuki
SPring-8/JASRI
Coauthor 9
0000588
Horie
Kazuyuki
SPring-8/JASRI
Related Proposal Information
Proposal Number
2006B0164
Beamline
BL46XU
Project Leader
佐藤 充