Title/Place of Publication
Publication ID
1105
Date Created
2007.01.30 10:55
DOI
10.1016/S0168-9002(01)00578-2
Open Access URL
English Title
Study of Local Strain Distribution in Semiconductor Devices Using High-Resolution X-Ray Microbeam Diffractometry
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Nuclear Instruments and Methods in Physics Research Section A
Vol.
467-468
No.
2
Year of Publication
2001
Page
1205-1208
Place of Publication (Oral, Poster)
Conference Title
International Conference on Synchrotron Radiation Instrumentation (SRI)
Date
2000.08.21-08.25
Venue
Berlin, Germany
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0001341
Yokoyama
Kazushi
Himeji Institute of Technology
Coauthor 1
0003437
Takeda
Shingo
Himeji Institute of Technology
Coauthor 2
0004194
Urakawa
Masafumi
Himeji Institute of Technology
Coauthor 3
0001231
Tsusaka
Yoshiyuki
Himeji Institute of Technology
Coauthor 4
0001230
Kagoshima
Yasushi
Himeji Institute of Technology
Coauthor 5
0001232
Matsui
Junji
Himeji Institute of Technology
Coauthor 6
0004124
Kimura
Shigeru
NEC Corporation
Coauthor 7
0001267
Kimura
Hidekazu
NEC Corporation
Coauthor 8
0003403
Kobayashi
Kenji
NEC Corporation
Coauthor 9
0004654
Ohhira
Tomoaki
NEC Corporation
Coauthor 10
0004081
Izumi
Koichi
NEC Corporation
Coauthor 11
0001797
Miyamoto
Naoki
SPring-8 Service Co., Ltd.
Related Proposal Information
Proposal Number
C99B0541
Beamline
BL24XU
Project Leader
松井 純爾