Title/Place of Publication
10239
2007.01.30 10:57
10.1016/j.tsf.2006.05.012
Small Angle X-ray Scattering Measurements of Porous Low-k Films using Synchrotron Radiation
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Thin Solid Films
515 4 2006 2410-2414
Authors
 
First Author 0009028 Suzuki Takashi Fujitsu Laboratories, Ltd.
Coauthor 1 0003923 Omote Kazuhiko Ragaku Corporation
Coauthor 2 0013823 Ito Yoshiyasu Rigaku Corporation
Coauthor 3 0002088 Hirosawa Ichiro SPring-8/JASRI
Coauthor 4 Nakata Yoshihiro Fujitsu Laboratories, Ltd.
Coauthor 5 Sugiura Iwao Fujitsu Laboratories, Ltd.
Coauthor 6 0013471 Shimizu Noriyoshi Fujitsu Laboratories, Ltd.
Coauthor 7 Nakamura Tomoji Fujitsu Laboratories, Ltd.
Related Proposal Information
2003B0390 BL19B2 鈴木 貴志
2004A0238 BL46XU 鈴木 貴志