Title/Place of Publication
Publication ID
10046
Date Created
2007.01.30 10:57
DOI
10.1016/j.vacuum.2005.11.033
Open Access URL
English Title
Alteration of Internal Stresses in SiO
2
/Cu/TiN Thin Films by X-ray and Synchrotron Radiation Due to Heat Treatment
Type of Publication
Refereed Journals, Doctoral Thesis, Refereed Proceedings
Place of Publication (Journal)
Journal Title
Vacuum
Vol.
80
No.
7
Year of Publication
2006
Page
836-839
Place of Publication (Oral, Poster)
Conference Title
Date
Venue
Research Area
Research Method
Authors
User Card ID No.
Last/Family
First/Given
Affiliation
Corresponding
Author
First Author
0008092
Matsue
Tatsuya
Niihama National College of Technology
Coauthor 1
0008084
Hanabusa
Takao
Tokushima University
Coauthor 2
Ikeuchi
Yasukazu
Niihama National College of Technology
Coauthor 3
0008085
Kusaka
Kazuya
Tokushima University
Coauthor 4
0003369
Sakata
Osami
SPring-8/JASRI
Related Proposal Information
Proposal Number
2004A0277
Beamline
BL13XU
Project Leader
日下 一也